Reaction Mechanisms and EB Patterning Evaluation of Sn-complex-side-chain Polymer Used for EUV Lithography

Takata, YuiYuiTakataMuroya, YusaYusaMuroyaKozawa, TakahiroTakahiroKozawaEnomoto, SatoshiSatoshiEnomotoNaqvi, BilalBilalNaqviDe Simone, DaniloDaniloDe Simone2024-06-042023-07-282024-06-042023978-1-5106-6103-50277-786XWOS:001022961000054https://imec-publications.be/handle/20.500.12860/42238Reaction Mechanisms and EB Patterning Evaluation of Sn-complex-side-chain Polymer Used for EUV LithographyProceedings paper10.1117/12.2670173978-1-5106-6104-2WOS:001022961000054