Energy and angular dependence of the sputter yield and ionization yield of Ge bombarded by O2+

Huyghebaert, CedricCedricHuyghebaertConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9079Energy and angular dependence of the sputter yield and ionization yield of Ge bombarded by O2+Proceedings paper