Heterogeneous integration of III-V material and silicon: fabrication and devices

Roelkens, GuntherGuntherRoelkensBrouckaert, JoostJoostBrouckaertChristiaens, IlseIlseChristiaensDe Mesel, KurtKurtDe MeselDumon, PieterPieterDumonVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9516Heterogeneous integration of III-V material and silicon: fabrication and devicesProceedings paper