Mannaert, GeertGeertMannaertAltamirano Sanchez, EfrainEfrainAltamirano SanchezHopf, TobyTobyHopfSebaai, FaridFaridSebaaiLorant, ChristopheChristopheLorantPetermann, ClaireClairePetermannHong, S-ES-EHongMullen, SSMullenWolfer, EEWolferMckenzie, DDMckenzieYao, HHYaoRahman, DDRahmanCho, J-YJ-YChoPadmanaban, MMPadmanabanPiumi, DanieleDanielePiumi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28911Spin on metal oxide materials for N7 and beyond patterning applicationsProceedings paperhttp://dx.doi.org/10.1117/12.2264323