On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEIS

Janssens, TomTomJanssensHuyghebaert, CedricCedricHuyghebaertVandervorst, WilfriedWilfriedVandervorstGildenpfennig, A.A.GildenpfennigBrongersma, H.H.Brongersma2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5368On the correlation between SI+ yields and surface oxygen concentration: the ultimate experiment with in-situ SIMS-LEISOral presentation