Growth of high-quality buried Y- and (Y, Nd)-silicide layers prepared by channelled ion implantation

Jin, S.S.JinBender, HugoHugoBenderWu, Ming FangMing FangWuVantomme, AndreAndreVantommeHogg, S.S.HoggPattyn, H.H.PattynLangouche, G.G.Langouche2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2654Growth of high-quality buried Y- and (Y, Nd)-silicide layers prepared by channelled ion implantationJournal article