Hydrogen-plasma-enhanced thermal donor formation in n-type high-ressitivity MCZ silicon

Simoen, EddyEddySimoenHuang, Y.L.Y.L.HuangClaeys, CorCorClaeysRafi, J.M.J.M.RafiJob, R.R.JobFahrner, W.R.W.R.FahrnerVersluijs, JankoJankoVersluijsClauws, P.P.Clauws2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11213Hydrogen-plasma-enhanced thermal donor formation in n-type high-ressitivity MCZ siliconProceedings paper