Mitcheson, Paul D.Paul D.MitchesonSterken, TomTomSterkenHe, C.C.HeKizirolgou, M.M.KizirolgouYeatman, E.E.YeatmanPuers, R.R.Puers2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14177Electrostatic microgeneratorsJournal article