Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performance

Nagar, MagiMagiNagarVaes, JanJanVaesEin-Eli, YairYairEin-Eli2021-10-182021-10-1820100013-4686https://imec-publications.be/handle/20.500.12860/17679Potassium sorbate as an inhibitor in copper chemical mechanical planarization slurries. Part II: Effects of sorbate on chemical mechanical planarization performanceJournal article