Tuning the strength of chemical patterns for directed self-assembly of block copolymers

Williamson, LanceLanceWilliamsonLin, GuanyangGuanyangLinCao, YiYiCaoGronheid, RoelRoelGronheidNealey, PaulPaulNealey2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24820Tuning the strength of chemical patterns for directed self-assembly of block copolymersProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1857167