Investigation of capacitance-voltage characteristics in Ge /high-k MOS devices

Moreau, M.M.MoreauMunteanu, D.D.MunteanuAutran, J.-L.J.-L.AutranBellenger, FlorenceFlorenceBellengerMitard, JeromeJeromeMitardHoussa, MichelMichelHoussa2021-10-182021-10-1820090022-3093https://imec-publications.be/handle/20.500.12860/15889Investigation of capacitance-voltage characteristics in Ge /high-k MOS devicesJournal article