Improved channel length and series resistance extraction for short-channel MOSFETs suffering from mobility degradation

Nicolett, A. S.A. S.NicolettMartino, Joao AntonioJoao AntonioMartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2052Improved channel length and series resistance extraction for short-channel MOSFETs suffering from mobility degradationJournal article