Integrated optics in a standard MCM-D motherboard technology demonstrated in O/E measurement probes

De Pauw, HerbertHerbertDe PauwDe Baets, JohanJohanDe BaetsVanfleteren, JanJanVanfleterenVan Calster, AndreAndreVan Calster2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7444Integrated optics in a standard MCM-D motherboard technology demonstrated in O/E measurement probesProceedings paper