Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flow

Singh, ArjunArjunSinghNam, JaewooJaewooNamLee, JongsuJongsuLeeChan, BTBTChanWu, HengpengHengpengWuYin, JianJianYinCao, YiYiCaoGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27325Manufacturability of dense hole arrays with directed self-assembly using the CHIPS flowProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2506453