Self-aligned block and fully self-aligned via for iN5 Metal 2 Self-aligned quadruple patterning

Vincent, BenjaminBenjaminVincentFranke, Joern-HolgerJoern-HolgerFrankeJuncker, AurelieAurelieJunckerLazzarino, FredericFredericLazzarinoMurdoch, GayleGayleMurdochHalder, SandipSandipHalderErvin, JosephJosephErvin2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32214Self-aligned block and fully self-aligned via for iN5 Metal 2 Self-aligned quadruple patterningProceedings paperhttps://doi.org/10.1117/12.2298761