Torsional mode MEMS resonator using thin film vacuum package

Onishi, K.K.OnishiNaito, YasuyukiYasuyukiNaitoYamakawa, T.T.YamakawaNakamura, K.K.NakamuraHelin, PhilippePhilippeHelinDe Coster, JeroenJeroenDe CosterHaspeslagh, LucLucHaspeslaghTilmans, HarrieHarrieTilmans2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21229Torsional mode MEMS resonator using thin film vacuum packageOral presentation