Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source

Dorney, KevinKevinDorneyHolzmeier, FabianFabianHolzmeierKissoon, Nicola N.Nicola N.KissoonWitting Larsen, EsbenEsbenWitting LarsenSingh, DhirendraDhirendraSinghArvind, ShikharShikharArvindSantra, SayantaniSayantaniSantraFallica, RobertoRobertoFallicaTimmermans, Marina Y.Marina Y.TimmermansPollentier, IvanIvanPollentierMakhotkin, Igor A.Igor A.MakhotkinPhilipsen, VickyVickyPhilipsenDe Gendt, StefanStefanDe GendtFleischmann, ClaudiaClaudiaFleischmannvan der Heide, PaulPaulvan der HeidePetersen, JohnJohnPetersen2025-08-052025-01-092025-08-0520241932-5150WOS:001389147600018https://imec-publications.be/handle/20.500.12860/45052Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet sourceJournal article10.1117/1.JMM.23.4.041406WOS:001389147600018RESISTTRANSMISSION