Influence of porosity on VUV induced damage to low-k dielectrics

Choudhury, F.F.Choudhuryde Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanovKing, S.S.KingNishi, Y.Y.NishiShohet, J.J.Shohet2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25080Influence of porosity on VUV induced damage to low-k dielectricsMeeting abstract