Thermal budget increased alloy disorder scattering of 2DEG in III-N heterostructures

Yu, HaoHaoYuParvais, BertrandBertrandParvaisZhao, MingMingZhaoRodriguez, RaulRaulRodriguezPeralagu, UthayasankaranUthayasankaranPeralaguAlian, AlirezaAlirezaAlianCollaert, NadineNadineCollaert2022-08-292022-06-162022-06-282022-08-292022-05-160003-6951WOS:000804998900003https://imec-publications.be/handle/20.500.12860/39960Thermal budget increased alloy disorder scattering of 2DEG in III-N heterostructuresJournal article10.1063/5.0093839WOS:000804998900003Electrical & electronic engineeringCONTENT ALGAN/GAN HETEROSTRUCTURESVAPOR-PHASE EPITAXYELECTRICAL-PROPERTIESGROWTHGANMOBILITY