Czarnecki, PiotrPiotrCzarneckiRottenberg, XavierXavierRottenbergSoussan, PhilippePhilippeSoussanNolmans, PhilipPhilipNolmansEkkels, PhillipPhillipEkkelsMuller, PhilippePhilippeMullerTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe RaedtPuers, BobBobPuersMarchand, LaurentLaurentMarchandDe Wolf, IngridIngridDe Wolf2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/11933Experimental evidence of non-uniform dielectric charging in capacitive RF-MEMS switchesProceedings paper