Assessment of radiation induced lattice damage in shallow trench isolation diodes irradiated by neutrons

Kobayashi, K.K.KobayashiOhyama, HidenoriHidenoriOhyamaHayama, KiyoteruKiyoteruHayamaTakami, Y.Y.TakamiSimoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiClaeys, C.C.Claeys2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4487Assessment of radiation induced lattice damage in shallow trench isolation diodes irradiated by neutronsOral presentation