2D inner assist features for 0.55NA: mask wafer data characterization

Leitao, SofiaSofiaLeitaoDhagat, PamlPamlDhagatChen, JeremyJeremyChenPandey, NiteshNiteshPandeyHennerkes, ChristophChristophHennerkes2026-03-312026-03-312025978-1-5106-9320-30277-786Xhttps://imec-publications.be/handle/20.500.12860/58972eng2D inner assist features for 0.55NA: mask wafer data characterizationProceedings paper10.1117/12.3071997WOS:001674167600053