Control of metal/oxide electron barriers in CB-RAM cells by low work-function liners

De Stefano, FrancescaFrancescaDe StefanoAfanasiev, ValeriValeriAfanasievHoussa, MichelMichelHoussaStesmans, AndreAndreStesmansOpsomer, KarlKarlOpsomerJurczak, GosiaGosiaJurczakGoux, LudovicLudovicGoux2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22224Control of metal/oxide electron barriers in CB-RAM cells by low work-function linersMeeting abstract