A life cycle cost (LCC) fab model: unique integration of IC manufacturing and facilities

Van Hoornick, NausikaaNausikaaVan HoornickRiedel, WolfgangWolfgangRiedel2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9759A life cycle cost (LCC) fab model: unique integration of IC manufacturing and facilitiesOral presentation