BEOL technology at 20nm half-pitch

Beyer, GeraldGeraldBeyerTokei, ZsoltZsoltTokei2021-10-192021-10-1920110038-111Xhttps://imec-publications.be/handle/20.500.12860/18563BEOL technology at 20nm half-pitchJournal articlehttp://www.electroiq.com/articles/sst/print/volume-54/issue-5/features/interconnect-structures/beol-technology-at-20nm-half-pitc