Latypov, Azat M.Azat M.LatypovWei, Chih-, IChih-, IWeiDe Bisschop, PeterPeterDe BisschopKhaira, GurdamanGurdamanKhairaFenger, GermainGermainFenger2023-01-052022-09-192023-01-052022978-1-5106-4977-40277-786XWOS:000850450900004https://imec-publications.be/handle/20.500.12860/40465Calibration of Gaussian Random Field stochastic EUV modelsProceedings paper10.1117/12.2614142978-1-5106-4978-1WOS:000850450900004