Surface engineering using self-assembled monolayers: model substrates for atomic-layer deposition

Whelan, CarolineCarolineWhelanDemas, Anne-CécileAnne-CécileDemasRomo Negreira, AinhoaAinhoaRomo NegreiraFernandez Landaluce, TatianaTatianaFernandez LandaluceSchuhmacher, JorgJorgSchuhmacherCarbonell, LaureLaureCarbonellMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11555Surface engineering using self-assembled monolayers: model substrates for atomic-layer depositionBook chapter