Modeling of in-plane distortions and overlay errors encountered during 3-D NAND flash device fabrication

Okudur, Oguzhan OrkutOguzhan OrkutOkudurGonzalez, MarioMarioGonzalezVan den Bosch, GeertGeertVan den BoschRosmeulen, MaartenMaartenRosmeulen2024-06-052023-10-172024-06-0520232833-8553WOS:001058887300035https://imec-publications.be/handle/20.500.12860/42804Modeling of in-plane distortions and overlay errors encountered during 3-D NAND flash device fabricationProceedings paper10.1109/EuroSimE56861.2023.10100780979-8-3503-4597-1WOS:001058887300035