Alves Donaton, RicardoRicardoAlves DonatonStucchi, MicheleMicheleStucchiJin, S.S.JinBender, HugoHugoBenderMaex, KarenKarenMaexVantomme, AndreAndreVantommeLangouche, G.G.Langouche2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2339Titanium silicidation of submicron poly-SiGe runnersProceedings paper