Interlayer techniques applied in GaN growth on silicon(111) by MOVPE

Cheng, KaiKaiChengLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteSijmus, BramBramSijmusGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11850Interlayer techniques applied in GaN growth on silicon(111) by MOVPEProceedings paper