Comparison of the electromigration behavior of Al(MgCu) with Al(Cu) and Al(SiCu)

Li, HuaHuaLiWitvrouw, AnnAnnWitvrouwJin, S.S.JinBender, HugoHugoBenderMaex, KarenKarenMaexFroyen, L.L.Froyen2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2724Comparison of the electromigration behavior of Al(MgCu) with Al(Cu) and Al(SiCu)Proceedings paper