Stress relaxation empirical model for biaxially strained triple-gate devices

Trevisoli, R.D.R.D.TrevisoliMartino, J.A.J.A.MartinoSimoen, EddyEddySimoenClaeys, CorCorClaeysPavanello, M.A.M.A.Pavanello2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19914Stress relaxation empirical model for biaxially strained triple-gate devicesProceedings paper