Chamirian, OxanaOxanaChamirianLauwers, AnneAnneLauwersKittl, JorgeJorgeKittlVan Dal, MarkMarkVan Dalde Potter de ten Broeck, MurielMurielde Potter de ten BroeckVrancken, ChristaChristaVranckenLindsay, RichardRichardLindsayMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8667Ni silicide morphology on small featuresProceedings paper