Scaling effects in dual-bit split-gate nitride memory devices

Breuil, LaurentLaurentBreuilHaspeslagh, LucLucHaspeslaghLorenzini, MartinoMartinoLorenziniDe Vos, JoeriJoeriDe VosVan Houdt, JanJanVan Houdt2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10152Scaling effects in dual-bit split-gate nitride memory devicesProceedings paper