VFTLP characteristics of ESD protection diodes in advanced bulk FinFET technology

Chen, Shih-HungShih-HungChenLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzHellings, GeertGeertHellingsBoschke, RomanRomanBoschkeGroeseneken, GuidoGuidoGroesenekenThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25069VFTLP characteristics of ESD protection diodes in advanced bulk FinFET technologyProceedings paper