Conard, ThierryThierryConardList, ScottScottListClaes, MartineMartineClaesBeckhoff, BuckardBuckardBeckhoff2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13554Advanced metrologies for cleans characterization: ARXPS, GIXF and NEXAFSProceedings paper