Li, HuaHuaLiBender, HugoHugoBenderConard, ThierryThierryConardMaex, KarenKarenMaexGutakovskii, A.A.GutakovskiiVan Landuyt, J.J.Van LanduytFroyen, L.L.Froyen2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4527Interaction of Ti capped Co thin film with Si3N4Journal article