Design, fabrication and first testing of a novel opto-mechanical ultrasound sensor in silicon photonics

Westerveld, WouterWouterWesterveldMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanSeveri, SimoneSimoneSeveriRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochus2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36326Design, fabrication and first testing of a novel opto-mechanical ultrasound sensor in silicon photonicsOral presentation