Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applications

Fernandez-Bolanos, M.M.Fernandez-BolanosVasylchenko, AlexanderAlexanderVasylchenkoDainesi, P.P.DainesiBrebels, StevenStevenBrebelsDe Raedt, WalterWalterDe RaedtVandenbosch, G.A.E.G.A.E.VandenboschIonescu, A.M.A.M.Ionescu2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17103Dipole antenna and distributed MEMS phase shifter fully integrated in a single wafer process for beam steering applicationsJournal article