Van Bavel, MiekeMiekeVan BavelVan Campenhout, JorisJorisVan CampenhoutBogaerts, WimWimBogaertsBaets, RoelRoelBaetsAbsil, PhilippePhilippeAbsil2021-10-202021-10-202012-08https://imec-publications.be/handle/20.500.12860/21681Silicon technology platform to advance the development of optical interconnectsJournal articlehttp://proddownloads.vertmarkets.com.s3.amazonaws.com/download/a1ecb571/a1ecb571-e41c-4c04-ab73-a09b00f40c43/original/silicon_ph