Huang, Y.L.Y.L.HuangSimoen, EddyEddySimoenClaeys, CorCorClaeysJob, R.R.JobMa, Y.Y.MaDüngen, W.W.DüngenFahrner, W.R.W.R.FahrnerVersluys, J.J.VersluysClauws, P.P.Clauws2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10621DLTS study on deep levels formed in plasma hydrogenated and subsequently annealed siliconProceedings paper