Pantisano, LuigiLuigiPantisanoAfanasiev, ValeriValeriAfanasievCimino, SalvatoreSalvatoreCiminoAdelmann, ChristophChristophAdelmannGoux, LudovicLudovicGouxChen, YangyinYangyinChenKittl, JorgeJorgeKittlWouters, DirkDirkWoutersJurczak, GosiaGosiaJurczak2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19535Towards barrier height modulation in HfO2/TiN by oxygen scavenging - Dielectric defects or metal induced gap states?Journal article