Impact of substrate resistivity on the high frequency performance of metal interconnect

Jenei, SnezanaSnezanaJeneiKol'dyaev, VictorVictorKol'dyaevDecoutere, StefaanStefaanDecoutereKuhn, RudigerRudigerKuhnDeferm, LudoLudoDeferm2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3537Impact of substrate resistivity on the high frequency performance of metal interconnectProceedings paper