Murota, JunichiJunichiMurotaYamamoto, YuchiYuchiYamamotoCostina, IoanIoanCostinaBaerwolf, FlorianFlorianBaerwolfTillack, BerndBerndTillackLe Thanh, VinhVinhLe ThanhLoo, RogerRogerLooDouhard, BastienBastienDouhardAyyad, MustafaMustafaAyyadCaymax, MattyMattyCaymax2021-10-242021-10-242017-11https://imec-publications.be/handle/20.500.12860/29042Dopant segregation and diffusion in CVD epitaxial grown germaniumProceedings paper