The device architecture dilemma for CMOS technologies: opportunities & challenges of FinFET over planar MOSFET

Parvais, BertrandBertrandParvaisMercha, AbdelkarimAbdelkarimMerchaCollaert, NadineNadineCollaertRooyackers, RitaRitaRooyackersFerain, IsabelleIsabelleFerainJurczak, GosiaGosiaJurczakSubramanian, VaidyVaidySubramanianDe Keersgieter, AnAnDe KeersgieterChiarella, ThomasThomasChiarellaKerner, ChristophChristophKernerWitters, LiesbethLiesbethWittersBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15993The device architecture dilemma for CMOS technologies: opportunities & challenges of FinFET over planar MOSFETProceedings paper