Hoffmann, Thomas Y.Thomas Y.HoffmannNoda, TaijiTaijiNodaFelch, S.S.FelchSeveri, SimoneSimoneSeveriParihar, V.V.PariharForstner, H.H.ForstnerVrancken, ChristaChristaVranckende Potter de ten Broeck, MurielMurielde Potter de ten BroeckVan Daele, BennyBennyVan DaeleBender, HugoHugoBenderNiwa, MasaakiMasaakiNiwaSchreutelkamp, RobRobSchreutelkampVandervorst, WilfriedWilfriedVandervorstBiesemans, SergeSergeBiesemansAbsil, PhilippePhilippeAbsil2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12301Laser annealed junctions: process integration sequence optimization for advanced CMOS technologiesProceedings paper