3D-Atomprobe : facts, artifacts and applications in semiconductors

Vandervorst, WilfriedWilfriedVandervorstKoelling, SebastianSebastianKoellingGilbert, MatthieuMatthieuGilbertKambham, Ajay KumarAjay KumarKambham2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/182243D-Atomprobe : facts, artifacts and applications in semiconductorsProceedings paper