Ryu, Heon-YulHeon-YulRyuTeugels, LieveLieveTeugelsDevriendt, KatiaKatiaDevriendtStruyf, HerbertHerbertStruyfKim, Tae-GonTae-GonKimPark, Jin-GooJin-GooPark2022-03-022022-03-0220212162-8769WOS:000698809800001https://imec-publications.be/handle/20.500.12860/39229Effects of H2O2 and pH on the Chemical Mechanical Planarization of MolybdenumJournal article10.1149/2162-8777/ac26d3WOS:000698809800001PEROXIDE DERIVATIVESCMPCORROSIONGLYCINE