The influence of elevated temperature on degradation and lifetime prediction of thin silicon-dioxide films

Kaczer, BenBenKaczerDegraeve, RobinRobinDegraevePangon, NadègeNadègePangonGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4463The influence of elevated temperature on degradation and lifetime prediction of thin silicon-dioxide filmsJournal article