Jonckheere, RikRikJonckheereAubert, RemkoRemkoAubertNair, Vineet VijayakrishnanVineet VijayakrishnanNairHendrickx, EricEricHendrickxWu, Chien-chingChien-chingWude Rooij-Lohmann, VeroniqueVeroniquede Rooij-LohmannEslstgeest, DorusDorusEslstgeestlenseL, HenkHenklenseLSoltwich, VictorVictorSoltwichHoenicke, PhilippPhilippHoenickeKolbe, MichaelMichaelKolbeScholze, FrankFrankScholze2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35337Study of EUV reticle storage effects through exposure on EBL2 and NXEProceedings paperhttps://doi.org/10.1117/12.2573125